Magnetic multilayer fabrication technology with selective activation of SU-8 films
Data(s) |
29/11/2016
29/11/2016
01/11/2016
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Resumo |
Developing magnetic multilayers are essential for reducing the core eddy current losses in the integrated power magnetic components (inductors/transformers). PVD based processes are typically used to achieve the multilayers with thin dielectric spacers. However, those processes are costly, and can be difficult to integrate. It is evident that cost effective alternative is needed. In recent years, electrochemical processes have been investigated to address these issues. One such method would be to successive metallization of insulating photoresists acting as spacer layer (such as SU-8) with soft magnetic films (such as Ni-Fe-Co alloys). This paper describes an experimental procedure to fabricate magnetic multilayers with a thin variant of SU-8 2 (< 1.5 µm) as inter-layers for integrated micro-inductors/transformers for power conversion applications. |
Formato |
application/pdf |
Identificador |
Anthony, R., Ó Mathúna, C. & Rohan, J. F. (2016) ‘Magnetic Multilayer Fabrication Technology with Selective Activation of SU-8 Films’, Journal of Physics: Conference Series, 757, 012031. doi: 10.1088/1742-6596/757/1/012031 757 012031-1 012031-7 1742-6588 http://hdl.handle.net/10468/3321 10.1088/1742-6596/757/1/012031 Journal of Physics: Conference Series |
Idioma(s) |
en |
Publicador |
IOP Publishing |
Relação |
info:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318529/EU/POWER SoC With Integrated PassivEs/POWERSWIPE info:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318529/EU/POWER SoC With Integrated PassivEs/POWERSWIPE |
Direitos |
© 2016, The Authors. Published under licence by IOP Publishing Ltd. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. https://creativecommons.org/licenses/by/3.0/ |
Palavras-Chave | #Power conversion circuitry #Magnetic multilayers #Micro-inductors #Micro transformers #Power conversion applications. |
Tipo |
Article (peer-reviewed) |