Synthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation

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Autoria(s): Zhang, Zefang; Liu, Weili; Song, Zhi-Tang; Hu, Xiaokai

Data(s)	01/01/2009
Identificador	http://hdl.handle.net/10536/DRO/DU:30052757
Idioma(s)	eng
Publicador	Electrochemical Society
Relação	http://dx.doi.org/10.1149/1.3096502
Tipo	Journal Article