Transition phenomena in a radio-frequency inductively coupled plasma
Data(s) |
21/03/2007
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Resumo |
Changes of the electron dynamics during the mode transition (E- to H-mode) in a hydrogen radio-frequency (rf) inductively coupled plasma are investigated using space and phase resolved optical emission spectroscopy. The E- mode is characterized through relatively weak optical emission which is strongly modulated on a nanosecond time scale during the rf-cycle, with one pronounced maximum per cycle. The modulation in H-mode, with twice the rf-frequency, is significantly weaker while the emission intensities are about two orders of magnitude higher. In particular the transition between these two modes is studied under variations of rf-power input and gas pressure. Characteristic spatio-temporal structures are observed and can be understood in the frame of a simple model combining both coupling mechanisms in the transition regime. |
Identificador |
http://dx.doi.org/10.1088/0022-3727/40/6/017 http://www.scopus.com/inward/record.url?scp=33947662502&partnerID=8YFLogxK |
Idioma(s) |
eng |
Direitos |
info:eu-repo/semantics/restrictedAccess |
Fonte |
Abdel-Rahman , M , Schulz-von Der Gathen , V & Gans , T 2007 , ' Transition phenomena in a radio-frequency inductively coupled plasma ' Journal of Physics D: Applied Physics , vol 40 (6) , no. 6 , 017 , pp. 1678-1683 . DOI: 10.1088/0022-3727/40/6/017 |
Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/3100/3101 #Physics and Astronomy (miscellaneous) |
Tipo |
article |