A Fabry-Perot Refractometer for Chemical Vapor Sensing by Solid-Phase Microextraction
| Data(s) |
14/03/2016
14/03/2016
14/03/2016
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| Resumo |
The contour lithography method [1] is used to improve the fabrication yield of previously demonstrated [2] microfluidic Fabry-Perot (FP) refractive index (RI) sensors. The sensors are then coated with polydimethylsiloxane (PDMS) based polymers to detect vapor analytes by solid-phase microextraction (SPME). Preliminary characterization of devices coated with two different polymers and exposed to xylenes vapors yields a maximum sensitivity of 0.015 nm/ppm and a detection limit below 120 ppm. |
| Identificador |
2160-5033 DDOI:10.1109/OMEMS.2011.6031012 |
| Idioma(s) |
en |
| Palavras-Chave | #Chemical Sensors #Fabry-Perot #Microfluidics #Microoptics #Optical Sensors #Optical Device Fabrication |
| Tipo |
Article |
