Molecular Dynamics simulations of growth and low-energy ion polishing of thin molybdenum films for EUV multilayer mirrors
| Data(s) |
2000
|
|---|---|
| Identificador |
http://www.scopus.com/inward/record.url?scp=0034500190&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Klaver , P , Goedheer , W J , Thijsse , B J & Bijkerk , F 2000 , ' Molecular Dynamics simulations of growth and low-energy ion polishing of thin molybdenum films for EUV multilayer mirrors ' Paper presented at Materials Research Society Fall meeting , Boston , United States , 01/01/2000 - 01/01/2000 , pp. 305 . |
| Tipo |
conferenceObject |
