Study of N+ implanted SiC thin films by FTIR and PL spectroscopy

Autoria(s): SongY; JinYF; WangZG; ZhangCH; ZhaoZM; DuanJL
Data(s)

2004
Identificador

http://ir.impcas.ac.cn/handle/113462/1673

http://www.irgrid.ac.cn/handle/1471x/127969
Fonte

SongY；JinYF；WangZG；ZhangCH；ZhaoZM；DuanJL.Study of N+ implanted SiC thin films by FTIR and PL spectroscopy,HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2004,28(6):626-628
Tipo

期刊论文
Acesso ao item digital