NOVEL SEMICONDUCTOR SUBSTRATE FORMED BY HYDROGEN-ION IMPLANTATION INTO SILICON (VOL 55, PG 2223, 1989)


Autoria(s): LI JM
Data(s)

1995

Identificador

http://ir.semi.ac.cn/handle/172111/15537

http://www.irgrid.ac.cn/handle/1471x/101807

Idioma(s)

英语

Fonte

LI JM .NOVEL SEMICONDUCTOR SUBSTRATE FORMED BY HYDROGEN-ION IMPLANTATION INTO SILICON (VOL 55, PG 2223, 1989) ,APPLIED PHYSICS LETTERS ,1995,67(3):444-444

Palavras-Chave #半导体材料
Tipo

期刊论文