THE MICRODEFECTS IN AS-GROWN CZ SILICON SINGLE-CRYSTALS - AN ELECTRON-MICROSCOPY STUDY

Autoria(s): QIAN JJ; CHU Y; LIN L
Data(s)

1986
Identificador

http://ir.semi.ac.cn/handle/172111/14707

http://www.irgrid.ac.cn/handle/1471x/101388
Idioma(s)

英语
Fonte

QIAN JJ; CHU Y; LIN L.THE MICRODEFECTS IN AS-GROWN CZ SILICON SINGLE-CRYSTALS - AN ELECTRON-MICROSCOPY STUDY,JOURNAL OF THE ELECTROCHEMICAL SOCIETY,1986,133(3):C107-C108
Palavras-Chave #半导体材料
Tipo

期刊论文
Acesso ao item digital