Silicon-on-insulator based 2 x 2 multimode interference coupler with large tolerance
Data(s) |
2001
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Resumo |
We demonstrate a type of 2 x 2 multimode interference 3 dB coupler based on silicon-on-insulator. The fabrication tolerance was investigated by the effective index method and the guide mode method. The devices with different lengths were fabricated and near-held output images were obtained. Tolerances to width, length and etch depth are 2, 200 and 2 mum, respectively. The devices show a uniform power distribution. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Wei HZ; Yu JZ; Liu ZL; Zhang XF; Shi W; Fang CS .Silicon-on-insulator based 2 x 2 multimode interference coupler with large tolerance ,CHINESE PHYSICS LETTERS,2001 ,18(2):245-247 |
Palavras-Chave | #半导体物理 #POWER SPLITTERS |
Tipo |
期刊论文 |