Recent advances in synthesis and properties of cubic boron nitride films


Autoria(s): Zhang XW (Zhang Xing-Wang); You JB (You Jing-Bi); Chen NF (Chen Nuo-Fu)
Data(s)

2007

Resumo

Cubic boron nitride (c-BN) attracts widespread interest as a promising material for many potential applications because of its unique physical and chemical properties. Since the 1980's the research in c-BN thin films has been carried out, which reached its summit in the mid of 1990's, then turned into a downward period. In the past few years, however, important progress was achieved in synthesis and properties of cubic boron nitride films, such as obtaining > 1 mu m thick c-BN films, epitaxial growth of single crystalline c-BN films, and advances in mechanics properties and microstructures of the interlayer of c-BN films. The present article reviews the current status of the synthesis and properties of c-BN thin films.

Identificador

http://ir.semi.ac.cn/handle/172111/9432

http://www.irgrid.ac.cn/handle/1471x/64128

Idioma(s)

中文

Fonte

Zhang, XW (Zhang Xing-Wang); You, JB (You Jing-Bi); Chen, NF (Chen Nuo-Fu) .Recent advances in synthesis and properties of cubic boron nitride films ,JOURNAL OF INORGANIC MATERIALS,MAY 2007,22 (3):385-390

Palavras-Chave #半导体材料 #cubic boron nitride (c-BN) films
Tipo

期刊论文