Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching
Data(s) |
2007
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Resumo |
A 3-dB paired interference (PI) optical coupler in silicon-on-insulator (SOI) based on rib waveguides with trapezoidal cross section was designed with simulation by a modified finite-difference beam propagation method (FD-BPM) and fabricated by potassium hydroxide (KOH) anisotropic chemical wet etching. Theoretically, tolerances of width, length, and port distance are more than 1, 100, and 1 mu m, respectively. Smooth interface was obtained with the propagation loss of 1.1 dB/cm at the wavelength of 1.55 mu m. The coupler has a good uniformity of 0.2 dB and low excess loss of less than 2 dB. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Li, ZY ; Yu, JZ ; Chen, SW ; Liu, JW ; Xia, JS .Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching ,CHINESE OPTICS LETTERS,2007 ,5(4): 215-217 |
Palavras-Chave | #光电子学 #SILICON-ON-INSULATOR |
Tipo |
期刊论文 |