Monolithic integration of sampled grating DBR with electroabsorption modulator by combining selective-area-growth MOCVD and quantum-well intermixing

We present the monolithic integration of a sampled-grating distributed Bragg reflector (SC-DBR) laser with a quantum-well electroabsorption modulator (QW-EAM) by combining ultra-low-pressure (55 mbar) selective-area-growth (SAG) metal-organic chemical vapour deposition (MOCVD) and quantum-well intermixing (QWI) for the first time. The QW-EAM and the gain section can be grown simultaneously by using SAG MOCVD technology. Meanwhile, the QWI technology offers an abrupt band-gap change between two functional sections, which reduces internal absorption loss. The experimental results show that the threshold current I-th = 62 mA, and output power reaches 3.6 mW. The wavelength tuning range covers 30 nm, and all the corresponding side mode suppression ratios are over 30 dB. The extinction ratios at available wavelength channels can reach more than 14 dB with bias of -5 V.

National Natural Science Foundation of China 90401025 607360366070600960777021National Basic Research Programme of China 2006CB604901 2006CB604902 National High-Tech Research and Development Programme of China 2006AA01Z256 2007AA03Z419 2007AA03Z417 Supported by the National Natural Science Foundation of China under Grant Nos 90401025, 60736036, 60706009, 60777021, the National Basic Research Programme of China under Grant Nos 2006CB604901 and 2006CB604902, and the National High-Tech Research and Development Programme of China under Grant Nos 2006AA01Z256, 2007AA03Z419, and 2007AA03Z417.