靶镜光学质量检测技术的研究

提出了一种利用扫描型哈特曼检测装置检验靶镜光学质量的技术.该装置对传统哈特曼检验装置的光阑进行了改进,通过扫描型哈特曼光阑的旋转扫描,可对被检靶镜全口径范围内连续采样.利用该扫描型哈特曼检测装置对一块口径为φ270 mm的非球面靶镜的能量集中度和波像差进行了检验,其结果与激光数字波面干涉仪的测量结果相吻合,其中能量集中度的相对测量误差为7.7%,波像差的相对测量误差为10.2%,验证了该检测技术的有效性.

abstract {A technology for the optical quality measurement of target lenses by a scanning Hartmann test apparatus is proposed. The scanning Hartmann test setup is formed by modifying the Hartmann screen of the conventional Hartmann test setup. By the rotation of the scanning Hartmann screen, the whole information of a target lens to be measured in the full aperture can be obtained. In experiments, the encircled energy and wavefront aberration of an aspheric target lens with an aperture of φ270 mm are measured by the scanning Hartmann test apparatus. The result agrees with the measurement results well which are obtained by a laser digital wavefront interferometer. The relative measurement errors of the encircled energy and wavefront aberration by the two methods are 7.7% and 10.2%, respectively. The validity of the measurement technology has been verified.}