A novel FOCAL technique based on BP-ANN


Autoria(s): Shi WJ; Wang XZ; Zhang DQ; Wang F; 马明英
Data(s)

2006

Resumo

In this paper, the feed-forward back-propagation artificial neural network (BP-ANN) algorithm is introduced in the traditional Focus Calibration using Alignment procedure (FOCAL) technique, and a novel FOCAL technique based on BP-ANN is proposed. The effects of the parameters, such as the number of neurons on the hidden-layer and the number of training epochs, on the measurement accuracy are analyzed in detail. It is proved that the novel FOCAL technique based on BP-ANN is more reliable and it is a better choice for measurement of the image quality parameters. (c) 2005 Elsevier GmbH. All rights reserved.

Identificador

http://ir.siom.ac.cn/handle/181231/1968

http://www.irgrid.ac.cn/handle/1471x/10509

Idioma(s)

英语

Fonte

Shi WJ;Wang XZ;Zhang DQ;Wang F;马明英.,Optik,2006,117(4):145-150

Palavras-Chave #BP-ANN #FOCAL technique #lithography
Tipo

期刊论文