An auto-focusing method for imaging ellipsometry system
| Data(s) |
2008
|
|---|---|
| Resumo |
An auto-focusing method based on the image brightness gradient sharpness function is presented for imaging ellipsometry system, in which the image plane of the thin-film specimen is not perpendicular to the optical axis. The clear image of a specimen with large area is obtained by moving the imaging sensor in optical axis direction and around its sensitive surface centre successively. The experimental results demonstrate its feasibility. |
| Identificador | |
| Idioma(s) |
英语 |
| Publicador |
Weinheim |
| Fonte |
Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5. 4th International Conference on Spectroscopic Ellipsometry (ICSE-4), Stockholm, SWEDEN. JUN 11-15, 2007, pp.1046-1049. |
| Tipo |
会议论文 |
