The Morphology of Hydrogenated Diamond-like Films and the Effect of the sp2 Fraction Disorder on Electronic and Micro-mechanical Properties


Autoria(s): Bell, John; Rybachuk, Maksym
Contribuinte(s)

Hariz, A

Data(s)

2005

Identificador

http://eprints.qut.edu.au/24476/

Publicador

SPIE (The International Society of Optical Engineering)

Relação

Bell, John & Rybachuk, Maksym (2005) The Morphology of Hydrogenated Diamond-like Films and the Effect of the sp2 Fraction Disorder on Electronic and Micro-mechanical Properties. In Hariz, A (Ed.) Microelectronics: Design, Technology, and Packaging II: Proceedings of SPIE, 12 December - 14 December 2005, Australia, Queensland, Brisbane.

Fonte

Faculty of Built Environment and Engineering

Palavras-Chave #020406 Surfaces and Structural Properties of Condensed Matter #091299 Materials Engineering not elsewhere classified #Diamond-like Carbon, Thin Film, Raman Spectroscpoy, Disorder
Tipo

Conference Paper