XPS and 19F NMR Study of the Photodegradation at 157 nm of Photolithographic-Grade Teflon AF Thin Films


Autoria(s): Blakey, Idriss; George, Graeme; Hill, David; Liu, Heping; Rasoul, Firas; Whittaker, Andrew; Zimmerman, Paul
Data(s)

2005

Identificador

http://eprints.qut.edu.au/23232/

Publicador

American Chemical Society

Relação

Blakey, Idriss, George, Graeme, Hill, David, Liu, Heping, Rasoul, Firas, Whittaker, Andrew, & Zimmerman, Paul (2005) XPS and 19F NMR Study of the Photodegradation at 157 nm of Photolithographic-Grade Teflon AF Thin Films. Macromolecules, 38, pp. 4050-4053.

Fonte

Faculty of Science and Technology

Palavras-Chave #030300 MACROMOLECULAR AND MATERIALS CHEMISTRY
Tipo

Journal Article